Joumal of Surface Analysis Vol.8 No.1 (2001) 76-85.
"Report on Sputter Etching Rate Database (SERD) Project of SASJ"
SERD project group of SASJ* and M.INOUE
(Received : January 25,2001)
Department of Electric Engineering Sestsunan Universty
Ikedanakamachi 17-8, Neyagawa, Osaka 572-8508, Japan
試料ティルト角からイオンビーム入射角を求める
(Reference)