Monte Carlo Simulation of Electron Trajectories (Reference)
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by Y. Yamaguchi, Setsunan University, 2010

Java SE 5 or later and Java 3D required.

Surface and Interface Analysis, 36 (2004) pp.1417-1422
"Monte-Carlo simulation of spatial distribution of characteristic x-rays in multi-film targets: source size of Al Ka x-rays in W/Al film targets"
Akihiro Yoshioka, Yoshikazu Yamaguchi, Keiji Tamura, and Ryuichi Shimizu