イオンによる単元素固体のスパッタリング収率 (エネルギー&入射角依存性)
Ion-induced Sputtering Yields of Monatomic Solids
energy and incident-angle dependence (Reference)

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* fs factor *


by T.Kosaka 2006, J.Wakimura 2005, M.Inoue 1997, Setsunan University

Reference1

Atomic Data and Nuclear Data 31(1984)1-80.

"Energy Dependence of the Ion-induced Sputtering Yields of Monatomic Solids"

N.Matsunami, Y.Yamamura, Y.Itikawa, N.Itoh, Y.Kazumata, S.Miyagawa, K.Morita, R.Shimizu and H.Tawara

Institute of Plasma Physics, Nagoya University
Chikusa-ku, Nagoya 464, Japan

Reference2

Atomic Data and Nuclear Data 62(1996)

"Energy Dependence of the Ion-induced Sputtering Yields of Monatomic Solids"

Y.YAMAMURA and H.TAWARA

Reference3

IPPJ-AM-26(1983)

"ANGULAR DEPENDENCE OF SPUTTERING YIELDS OF MONATOMIC SOLIDS"

Y.YAMAMURA, Y.ITIKAWA and N.ITHO

INSTITUTE OF PLASMA PHYSICS NAGOYA UNIVERSITY