イオンによる単元素固体のスパッタリング収率
Ion-induced Sputtering Yields of Monatomic Solids(Reference)

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by M.Inoue, Setsunan Univ., 1997

Reference

Atomic Data and Nuclear Data 31(1984)1-80.

"Energy Dependence of the Ion-induced Sputtering Yields of Monatomic Solids"

N.Matsunami, Y.Yamamura, Y.Itikawa, N.Itoh, Y.Kazumata, S.Miyagawa, K.Morita, R.Shimizu and H.Tawara

Institute of Plasma Physics, Nagoya University
Chikusa-ku, Nagoya 464, Japan