イオンによる単元素固体のスパッタリング収率と、スパッタ深さ方向分析における深さ分解能
(エネルギー&入射角依存性)
Ion-induced Sputtering Yields of Monatomic Solids (Reference1, Reference2)
Broadening by Cascade Mixing in Sputter Depth Profiling (Reference3)
Energy & Incident-angle Dependence
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* fs factor *

by A.Hirao 2002, T.Kosaka 2006, M.Inoue 2007, Setsunan University


Reference 1
Atomic Data and Nuclear Data 62(1996)
"Energy Dependence of the Ion-induced Sputtering Yields of Monatomic Solids"
Y.Yamamura and H.Tawara

Reference 2
IPPJ-AM-26(1983)
"Angular Dependence of Sputtering Yields of Monatomic Solids"
Y.Yamamura, Y.Itikawa and N.Itoh
Institute of Plasma Physics, Nagoya University

Reference 3
Appl.Phys.18(1979)131-140.
"The Depth Resolution of Sputter Profiling"
H.H. Andersen
Institute of Physics, University of Aarhus, DK-8000 Aarhus C, Denmark